THIN FILM CAPACITOR, COMBINED PASSIVE COMPONENT INCLUDING THE THIN FILM CAPACITOR, METHOD OF MANUFACTURING SAME, AND WIRING BOARD INCLUDING SAME

摘要

PROBLEM TO BE SOLVED: To prevent a dielectric thin film from being broken by stress caused by the dielectric thin film even when the dielectric thin film is formed at a high temperature than the cure temperature of a flexible base material.

SOLUTION: A thin film capacitor has a lower electrode 5, a dielectric thin film 8, and an upper electrode 9 that are laminated on a flexible base material 1, wherein the lower electrode 5 has a contact electrode 2 being contact with the insulating base material, an oxidation resistant electrode 4 being contact with the dielectric thin film, and a high elasticity electrode 3 which is provided between the contact electrode 2 and the oxidation resistant electrode 4 and has a higher Young's modulus than the oxidation resistant electrode. The high elasticity electrode 3 is 400 nm or larger in thickness.

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