METHOD OF MANUFACTURING ORIGINAL OF OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an original of an optical disk that can form a high precision pattern meeting the requirement for high density recording by precisely controlling the development process in 3-dimensional fine patterning. SOLUTION: The method of manufacturing an original forms a prescribed asperity pattern on a base plate 21 by coating a photosensitive layer 22 on it and developing it. In the development process of the photosensitive layer 22 after applying it on the base plate 21 and exposing the pattern matching the required asperity, by radiating the detecting light L to the base plate 21, and detecting the ratio of the±1th light amount and the 0th light amount of the transmitting diffracted light L0, L1, and L-1coming from the base plate 21 and from the photosensitive layer 22, the developing solution is removed from, at least, the transmitting area of the detecting light L on the photosensitive layer 22. COPYRIGHT: (C)2004,JPO