OPTICAL TEMPERATURE SENSOR

摘要

PROBLEM TO BE SOLVED: To require no external electric power source, to allow repeated use under a non-contact condition, and to provide high spatial resolution and high reliability. SOLUTION: In a sensor body 10 of this sensor wherein a micro-cantilever 2 of a support body comprising a thin film structure constituted of only a shape memory alloy thin film is held by a substrate 1 to form an optical mirror, an incident light L1of natural light changes an advancing direction at an angle of 2θ1of reflection angle in an optical interface 3 of the micro-cantilever 2 under the condition where no temperature change exists, so as to be advanced as a reflected light LR, but the micro-cantilever 2 is brought into a curved condition shown as a dotted line, in accompaniment to the temperature change, under the condition where the temperature change exists, because the micro-cantilever 2 comprises the shape memory alloy thin film, an advancing direction is changed at an angle of 2θ2(>2θ1) of reflection angle in an optical interface 5 to be advanced as a reflected light LR', and change of luminous energy is detected by a detector 12 sufficiently distant from the sensor body 10. COPYRIGHT: (C)2004,JPO