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发明名称
NORMALLY LATCHED MEMS ENGAGEMENT MECHANISM
摘要
申请公布号
AU2003237352(A1)
申请公布日期
2004.02.16
申请号
AU20030237352
申请日期
2003.06.03
申请人
3M INNOVATIVE PROPERTIES COMPANY
发明人
MELINDA K., KOVACH;MICHAEL E., HAMERLY
分类号
B81B5/00;G02B26/08;(IPC1-7):G02B26/08
主分类号
B81B5/00
代理机构
代理人
主权项
地址
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