METHOD FOR FABRICATING MASK BLANK OR MASK BY USING WASTE MASK

摘要

PURPOSE: A method for fabricating a mask blank or a mask by using a waste mask is provided to fabricate a low-priced mask and reduce a fabricating cost by recycling the waste mask. CONSTITUTION: A mask is extracted from a raw material mask(401-413). A state of defect is determined by inspecting the mask. A new mask for forming a fine pattern is fabricated if the defect is not found on the substrate. After the new mask is fabricated, an inspecting process for the fabricated mask is performed. A packaging process is performed if an error is not found on the fabricated mask. In the extracting process, a pellicle is removed from the raw material mask(403-407). In addition, a function layer is removed from the raw material mask(409-413).