| 摘要 |
PROBLEM TO BE SOLVED: To suppress the lowering of a resolution by generating a plurality of different exposure wavelengths and selecting or combining the exposure wavelength depending on a transfer pattern. SOLUTION: In a proximity X-ray aligner employing a point source light source, a disc target 14 arranged in an X-ray light source unit is irradiated with condensed laser light 21 in order to generate plasma and X-rays 17. The disc target 14 has four kinds of light emitting parts of different materials divided in the radial direction at regular intervals, i.e. a first wavelength light-emitting part 14a, a second wavelength light emitting part 14b, a third wavelength light-emitting part 14c, and a fourth wavelength light-emitting part 14d. The target 14 is subjected to rotation control in synchronism with pulse emission by a rotary drive mechanism and when a rotational angle is controlled in synchronism with the emission of the laser light 21, the material (kind) of the target 14 can be selected from among the first wavelength light-emitting part 14a, the second wavelength light-emitting part 14b, the third wavelength light-emitting part 14c, and the fourth wavelength light-emitting part 14d. COPYRIGHT: (C)2004,JPO
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