发明名称 |
Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions |
摘要 |
The present invention relates to gas separation membranes including a metal-based layer having sub-micron scale thicknesses. The metal-based layer can be a palladium alloy supported by ceramic layers such as a silicon oxide layer and a silicon nitride layer. By using MEMS, a series of perforations (holes) can be patterned to allow chemical components to access both sides of the metal-based layer. Heaters and temperature sensing devices can also be patterned on the membrane. The present invention also relates to a portable power generation system at a chemical microreactor comprising the gas separation membrane. The invention is also directed to a method for fabricating a gas separation membrane. Due to the ability to make chemical microreactors of very small sizes, a series of reactors can be used in combination on a silicon surface to produce an integrated gas membrane device.
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申请公布号 |
US2004028602(A1) |
申请公布日期 |
2004.02.12 |
申请号 |
US20030372885 |
申请日期 |
2003.02.24 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
FRANZ ALEKSANDER J.;JENSEN KLAVS F.;SCHMIDT MARTIN A.;FIREBAUGH SAMARA |
分类号 |
B01D53/22;B01D71/02;B01J19/00;B01J23/44;C01B3/50;C01B3/56;H01M8/06;(IPC1-7):B01D53/22 |
主分类号 |
B01D53/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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