| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive, highly reliable and precise liquid ejection head and its manufacturing method. SOLUTION: A positive photosensitive material layer is formed on a substrate by thermally crosslinking an ester methacrylate, methacrylic acid (2-30 wt%) and a copolymer (molecular weight 5,000-50,000) and then it is exposed to form a liquid channel pattern.The patterned positive photosensitive material layer is then coated with a negative coating resin layer which is eventually cured.Furthermore, the positive photosensitive material layer is irradiated with ionizing radiation and decomposed and then the pattern is dissolved and removed thus forming a liquid channel. COPYRIGHT: (C)2004,JPO
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