发明名称 ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a high performance electron microscope and an image observing device by improving each characteristic of luminous efficiency, luminance saturation reduction and service life of a phosphor composing a fluorescent film of scintillator and a fluorescent screen of a transmission type electron microscope. SOLUTION: The transmission type electron microscope is provided with the scintillator 11 and the fluorescent screen 9 formed with the fluorescent film, and a means for irradiating a transmission electron beam on the fluorescent film to carry out observation. By using the phosphor represented by a formula of (Y<SB>1-x</SB>, Gd<SB>x</SB>)<SB>3</SB>(Al, Ga)<SB>5</SB>O<SB>12</SB>:Re, (Y<SB>1-x</SB>, Gd<SB>x</SB>)<SB>2</SB>O<SB>3</SB>:Eu, (Y<SB>1-x</SB>, Gd<SB>x</SB>)BO<SB>3</SB>:Eu wherein Re is an element from at least either one of Tb or Ce and x is 0≤x≤1 in the fluorescent film, the electron microscope and the image observing device realizing improvement of the luminous efficiency, luminance saturation reduction, and service life characteristic is provided. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004047196(A) 申请公布日期 2004.02.12
申请号 JP20020200883 申请日期 2002.07.10
申请人 HITACHI LTD 发明人 INOUE AKIRA;KOMATSU MASAAKI;SHIIKI MASATOSHI;IMAMURA SHIN
分类号 C09K11/78;C09K11/80;H01J37/244;H01J37/26;(IPC1-7):H01J37/244 主分类号 C09K11/78
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