| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate rotating/holding device which is capable of holding a substrate in a horizontal position with a strong holding power at all times and a rotary type substrate processing apparatus using the same. SOLUTION: A plurality of stationary rotating/holding members 2 and two rotary holding members 5 are fitted on the top surface of a rotating member 1, along the circumference of a circle whose center coincides with a rotating axis 1a. The two rotary holding members 5 are arranged at positions, which are not point-symmetrical to each other about the rotation axis 1a, and the stationary holding members 2 are arranged at positions so as to confront the rotary holding members 5, respectively. The rotary holding members 5 are each composed of a columnar support 6 and a columnar holder 7, whose diameter is smaller than that of the support 6. The support 6 is fitted turnably on the rotating member 1 about its rotation axis as the center axis. The holder 7 is provided on the top surface of the support 6, while its center axis is located off the rotation axis of the support 6. The outer peripheral surfaces of the holders 7 are made to bear with respect to the peripheral edge of a substrate 100 with the rotation of the supports 6, so that the substrate 100 can be held in the horizontal direction. COPYRIGHT: (C)2004,JPO |
