Photonic device with monitor

摘要

A photonic device has a semiconductor substrate with an active photosensitive surface generating a photocurrent dependent on the intensity of light falling on it. A light emitting element, typically a VCSEL, having a lower electrode is located on a contact element in the middle of the active surface. The light emitting element covers the contact element. A doped conductive path within the substrate establishes electrical connection between the contact element and a peripheral bonding pad. The doped path preferably constitutes the entirety of the upper layer forming the photosensitive surface.