| 摘要 |
PURPOSE: A magnetic chuck using a permanent magnet is provided to improve working precision by preventing the thermal deformation of a bed. CONSTITUTION: In a magnetic chuck including a bed and a board having a magnet generating unit, partition plates(30) are installed in an inner space(22) at regular intervals. Permanent magnets are located between the partition plates. Iron cores(50) are coupled to the top of the permanent magnets. Coils are wound around the permanent magnets and the iron cores. A control box is electrically connected to the coil, and demagnetizes/magnetizes the permanent magnets.
|
