RADIATION SENSITIVE RESIN COMPOSITION

摘要

PURPOSE: To provide a radiation sensitive resin composition having high sensitivity, a high rate of a developed residual film and high solvent resistance and ensuring high productivity. CONSTITUTION: In the radiation sensitive resin composition comprising (A) an alkali-soluble resin, (B) a radiation sensitive compound and (C) a solvent, >=16 mass% of the solvent is α-hydroxyisobutanoic esters.