发明名称 METHOD FOR PRODUCING AN ELECTRONIC COMPONENT, ESPECIALLY A MEMORY CHIP
摘要 A method for producing an electronic component, especially a memory chip, using a laser-induced correction to equalize an integrated circuit by means of at least one laser via in a layer at least partially covering the circuit. The component comprises a rewiring of the contact pads. The inventive method comprises the following steps: each laser via is closed by means of a separate covering layer which is to be applied locally; a rewiring extending between the local covering layers is created; the local covering layers are removed; and the laser-induced correction is carried out by means of the open laser vias.
申请公布号 EP1388168(A2) 申请公布日期 2004.02.11
申请号 EP20020740593 申请日期 2002.05.13
申请人 INFINEON TECHNOLOGIES AG 发明人 HEDLER, HARRY;IRSIGLER, ROLAND;VASQUEZ, BARBARA
分类号 H01L21/66;H01L23/525;(IPC1-7):H01L21/768;H01L23/485;H01L21/60 主分类号 H01L21/66
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