发明名称 |
Coaxial FIB-SEM column |
摘要 |
<p>A system including co-axial focused ion beam and an electron beam allows for accurate processing with the FIB using images formed by the electron beam. In one embodiment, a deflector deflects the electron beam onto the axis of the ion beam and deflects secondary particles collected through the final lens toward a detector. In one embodiment, a positively biased final electrostatic lens focuses both beams using the same voltage to allow simultaneous or alternating FIB and SEM operation. In one embodiment, the landing energy of the electrons can be varied without changing the working distance. <IMAGE></p> |
申请公布号 |
EP1388883(A2) |
申请公布日期 |
2004.02.11 |
申请号 |
EP20030077444 |
申请日期 |
2003.08.05 |
申请人 |
FEI COMPANY |
发明人 |
GERLACH, ROBERT L.;UTLAUT, MARK W.;SCHEINFEIN, MICHAEL R. |
分类号 |
H01J37/12;G01N23/00;G21K7/00;H01J37/05;H01J37/244;H01J37/26;H01J37/28;H01J37/305;H01J37/317;(IPC1-7):H01J37/305 |
主分类号 |
H01J37/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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