发明名称 |
ELECTRIC FIELD EMISSION DEVICE HAVING A TRIODE STRUCTURE FABRICATED BY USING AN ANODIC OXIDATION PROCESS AND METHOD FOR FABRICATING SAME |
摘要 |
An electric field emission device having a triode structure is fabricated by using an anodic oxidation process. The device includes a supporting substrate, a bottom electrode layer to be used as an cathode electrode of the device, a gate insulating layer having a plurality of first sub-micro holes, a gate electrode layer having a plurality of second sub-micro holes connecting to the first sub-micro holes, an anode insulating layer having a plurality of third sub-micro holes connecting to the second sub-micro holes, a top electrode layer for hermetically sealing the device, the top electrode layer being used as an anode of the device and a plurality of emitters formed in the first sub-micro holes. The emitters are formed so as to come into as close contact as possible to the electrodes of the device, which results in decreasing a driving voltage for the device. |
申请公布号 |
WO2004012218(A1) |
申请公布日期 |
2004.02.05 |
申请号 |
WO2003KR01526 |
申请日期 |
2003.07.30 |
申请人 |
POSTECH FOUNDATION;LEE, KUN-HONG;HWANG, SUN-KYU;JEONG, SOO-HWAN |
发明人 |
LEE, KUN-HONG;HWANG, SUN-KYU;JEONG, SOO-HWAN |
分类号 |
H01J1/304;H01J9/02;H01J21/10 |
主分类号 |
H01J1/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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