发明名称 Method of manufacturing thin film magnetic head
摘要 The method of manufacturing a thin film magnetic head is capable of precisely forming a core section with preventing the variation of the write-core head caused by ion milling for removing an electric conductive film and capable of improving yield of products. The method of manufacturing a thin film magnetic head, in which a core section having prescribed write-core width is formed by applying ion milling to an upper magnetic pole and a lower magnetic pole, comprises the steps of examining the write-core width of the core section; covering a surface of the core section with a protection film except an electric conductive film for preventing electro static charge of a wafer; and removing the exposed electric conductive film by ion milling.
申请公布号 US2004020029(A1) 申请公布日期 2004.02.05
申请号 US20030631624 申请日期 2003.07.31
申请人 FUJITSU LTD 发明人 KAKEHI MASAHIRO
分类号 G11B5/31;G11B5/39;(IPC1-7):G11B5/127;H04R31/00;H05K3/02 主分类号 G11B5/31
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