| 摘要 |
PROBLEM TO BE SOLVED: To extremely accurately observe an image of a probe needle tip by a probe object lens. SOLUTION: A confocal disk 30 is arranged at the location of the image of the needle tip 10 of a probe needle 8 at which an image is formed by the probe object lens 6. In other words, the needle tip 10 of the probe needle 8 and the confocal disk 30 are at conjugate locations via the probe object lens 6. Reflected light from the needle tip 10 of the probe needle 8 is made to form an image by the probe object lens 6 and passed through an opening of the confocal disk 30, and its sectioning image is formed in a light receiving plane of a CCD 12. COPYRIGHT: (C)2004,JPO
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