| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor capable of reducing a manufacturing cost and having stable quality. SOLUTION: This vibration sensor 10 has a piezoelectric element 11. Electrodes are formed on both surfaces 11A and 11B of the piezoelectric element 11, of which the one end is a free end, and the other end is a fixed end. A support member 12 for supporting the piezoelectric element 11 is mounted on the surface 11B in the vicinity of the fixed end of the piezoelectric element 11. Electronic components and the support member 12 are fixed to an element board 15. The electrode on the surface 11A of the piezoelectric element 11 is electrically connected to the electrode on the element board 15 or the electrodes of the electronic components through a connection member 13. In particular, the connection member 13, the electrode on the surface 11A, the support member 12 and the electrode on the surface 11B are fixed by an adhesive. COPYRIGHT: (C)2004,JPO
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