| 摘要 |
PROBLEM TO BE SOLVED: To provide a stamper having a super long life by making the surface hardness is higher than the rear face hardness ever before. SOLUTION: Nickel conductive film of 20 nm is formed in a master disk by a sputtering method. Thus, the conductive processed master disk is put into a high concentration nickel sulfamic acid bath and a plating layer with a thickness of 300μm is formed. Electrocast liquid A used has specifications of nickel ion concentration 650 g/l, boric acid 40 g/l, pH3.9 with a liquid temperature of 55°C. Electrocast liquid B used is the electrocast liquid A doped with saccharin system hardener 1%. Electrocast liquid B is used for beginning and electrocast of the stamper with board thickness of 100μm is carried out. Deionized water cleans it lightly and electrocasting of the 200μm of the remaining board thickness is carried out with the electrocast liquid A and a stamper with total thickness of 300μm is created. When measured indentation hardness of stamper, the embodiment is 352 Hv(s) at the surface and 145 Hv(s) at the rear face. COPYRIGHT: (C)2004,JPO
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