发明名称 PRODUCTION OF WIRING CIRCUIT SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide the production of a wiring circuit substrate which forms a conductor layer of a uniform thickness in spite of the configuration or arrangement of a wiring circuit pattern. SOLUTION: A conductive thin film 2 is formed on a base insulation layer 1, and a plated resist 3 is formed on the conductive thin film 2 with the reverse pattern of a predetermined wiring circuit pattern. Thereafter, a conductive layer 4 is formed by electrolysis plating on a part in the conductive thin film 2, whereat the plated resist 3 is not formed as a predetermined wiring circuit pattern. Then, the conductive layer 4 is etched to the halfway in the direction of the thickness thereof under a condition that the plated resist 3 is formed. The conductive thin film 2 at the part of the plated resist 3 and a part opposed to the plated resist 3 is removed, and a cover insulation layer 5 is applied on the conductive layer 4 to obtain the wiring circuit substrate. According to this method, the thickness of the conductive layer 4 can be uniformed by the etching even when varieties are generated in the thickness of the conductive layer 4 immediately after the layer is formed by the electrolysis plating. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004039771(A) 申请公布日期 2004.02.05
申请号 JP20020192982 申请日期 2002.07.02
申请人 NITTO DENKO CORP 发明人 UENDA DAISUKE;SHINOKI YOSHIFUMI
分类号 H05K3/18;(IPC1-7):H05K3/18 主分类号 H05K3/18
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