| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment furnace for reducing equipment cost, having high utilization efficiency of a constitutive part, reducing the occupying floor area, flexibly coping with a load change of a treating object, and suitable for small lot multi-production. SOLUTION: This multi-chamber heat treatment furnace is provided with a plurality of treating chambers 4, 5, 6 and 7, a front chamber 1 for allowing a vacuum purge for inserting/discharging the treating object and a main carrying chamber 2 rotatable around a vertical shaft and housing a main carrying means 3 for carrying the treating object between the treating chambers 4 to 7 or the front chamber 1. The plurality of treating chambers 4 to 7 and the front chamber 1 are respectively, replaceably and parallelly connected and arranged to a connecting port arranged so as to peripherally contact with the same cylindrical surface coaxial with a vertical rotary shaft to the main carrying chamber 2, and the plurality of treating chambers 4 to 7 include a burning-off chamber 4. COPYRIGHT: (C)2004,JPO
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