| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface treatment method by which more uniform film deposition can be performed without depending on the facial shape to be treated, and to provide an optical component film-deposited thereby. <P>SOLUTION: A coating film is deposited on the curved surface of a base material of the optical component by a high frequency plasma CVD (Chemical Vapor Deposition) method. Thus, the film having more uniform thickness and properties can be deposited even if the surface deposition face of the base material is the curved one. Further, there is no need of rotating the base material as in the conventional technique, or there is no need of placing the base material in a vacuum atmosphere, so that equipment cost can low be suppressed. Thereby, production cost is reduced, and treatment efficiency is improved as well. <P>COPYRIGHT: (C)2004,JPO |
