| 摘要 |
A method of forming fine partition walls by which fine partition walls with stable shape can be formed with good processing accuracy and at good grinding efficiency by a jet processing technique, a method of producing a planar display device by application of the method, and an abrasive for jet processing to be used in these methods, are disclosed. The fine partition walls are formed on the surface of a substrate, by jet processing using an abrasive comprised of a powder of calcium carbonate coated with silicone on the surfaces thereof. Each of the particles constituting the abrasive has a three-dimensional shape comprised of a stack of different-sized triangular or more-angular polygonal layers. The maximum particle diameter of the abrasive is not more than ½ times the width (W1) of the fine partition walls, and the mean particle diameter of the abrasive is not more than 1/5 times the width (W1) of the fine partition walls. In addition, the maximum particle diameter of the abrasive is not more than 10 mum. The pitch (P1) of the fine partition walls (24) is not more than 150 mum, the width (W1) of the fine partition walls (24) is not more than 50 mum, and the height (H1) of the fine partition walls (24) is not more than 300 mum. The thickness of a resist film (30) is not more than 1.2 times the width (W1) of the fine partition walls (24).
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