发明名称 method of forming a structure by a lithographic pattern
摘要 <p>A stamper (101) includes a substrate (102) and a plurality of protrusions (105), (106), (107), (108) of different heights formed on one of the surfaces of the substrate, the protrusions of larger height having a stack structure formed of at least two layers of at least two types of materials, thereby transferring a plurality of patterns at the same time. &lt;IMAGE&gt;</p>
申请公布号 EP1387216(A2) 申请公布日期 2004.02.04
申请号 EP20030016539 申请日期 2003.07.23
申请人 HITACHI, LTD. 发明人 HASEGAWA, MITSURU;MIYAUCHI, AKIHIRO
分类号 H01L21/027;B29C33/42;B29C43/36;G03F7/00;(IPC1-7):G03F7/00;B29C43/00 主分类号 H01L21/027
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