| 摘要 |
PURPOSE: Semiconductor manufacturing equipment having a multi-chamber is provided to be capable of preventing process delay for improving productivity. CONSTITUTION: A semiconductor manufacturing equipment is provided with a body part(20), a plurality of load-lock chambers(25,26) connected with the body part for loading/unloading a wafer, and a plurality of process chambers(21,22) connected with the body part for independently carrying out a predetermined process. The semiconductor manufacturing equipment further includes a plurality of aligner(24a, 24b) for the wafer. Preferably, the aligners are supplied to transfer chambers, wherein the transfer chamber is connected with the body part. Preferably, the semiconductor manufacturing equipment further includes a cooling chamber(23) for the wafer.
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