发明名称 Method of manufacturing a device
摘要 A method of manufacturing a device includes activating a gas containing at least one of hydrogen and of nitrogen by a hollow cathode discharge and exposing a first surface of a first material to the activated gas, thereby generating at the first surface an enrichment of at least one of hydrogen and of nitrogen and applying a further treatment to the enriched surface.
申请公布号 US2004018320(A1) 申请公布日期 2004.01.29
申请号 US20020202387 申请日期 2002.07.25
申请人 NICOLUSSI GUENTHER 发明人 NICOLUSSI GUENTHER
分类号 H01J37/32;H01L21/48;(IPC1-7):H05H1/00 主分类号 H01J37/32
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