CARBON NANOTUBE WIRING BOARD AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a carbon nanotube wiring board which is formed in the predetermined pattern with a carbon nanotube which can be oriented in the predetermined direction and also provide a method of manufacturing the same. SOLUTION: The carbon nanotube wiring board comprises a substrate and a wiring pattern wired on the substrate and composed of carbon nanotubes. The method of manufacturing the wiring board comprises the sequential processes for forming a control film 4 (silicon oxide film or the like) to control formation of a carbon nanotube on the surface of silicon carbide 3, etching the control film 4 to the predetermined pattern, and heating the silicon carbide after the etching to the temperature for decomposing the silicon carbide to lose silicon atoms from the surface of the silicon carbide under the atmosphere including a very small amount of oxygen. Accordingly, the wiring board on which the wiring pattern 2 composed of the carbon nanotubes is formed according to the pattern can be manufactured. COPYRIGHT: (C)2004,JPO