摘要 |
PROBLEM TO BE SOLVED: To provide a polishing tool wherein the dressing by light is performed even with a low pressure mercury lamp with low radiation heat, and dissolved matter is removed with water. SOLUTION: The polishing tool used for polishing includes photodegradable resin or photo sensitizer or photo catalyst. It is desirable that the photodegradable resin or the photo sensitizer or the photo catalyst is dispersed in the polishing tool. In the polishing tool consisting of abrasive grains, binder resin and pores, there are a photoreactive part and a non photoreactive part. In the dressing method, the photoreactive part forms a concave part, and the non photoreactive part forms a convex part by irradiating the light on the surface of the tool. COPYRIGHT: (C)2004,JPO
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