| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate generation of a pseudo-defect, and to precisely detect a defect. <P>SOLUTION: This system by an 8-neighborhood point adjoining comparison system in an imaging inspection device has an imaging system 1 for imaging an inspected object to be focused in an imaging element, an image processing part 5 for image-processing a photoelectrically converted image data output from the imaging element to generate an image data for detecting the defect, and a control part 6 for controlling the whole, in a defect detecting system for detecting the defect in an individual inspecting portion by the 8-neighborhood point adjoining comparison system. The system has also a processing part 7 for conducting various kinds of computation processing such as a comparison operation imparted with a priority order for respective brightness data in an adjacent two points in any direction out of 8 points adjacent laterally, vertically or diagonally sandwiching an inspection object point therebetween in the image data, a selection part 8 for selecting the two points in the optimum comparison direction used for the comparison with the objective point, and a defect detecting part 9 for comparing an average value of the selected two points in the optimum comparison direction with the brightness data in the objective point to detect the presence of the defect in the objective point. <P>COPYRIGHT: (C)2004,JPO |
