| 摘要 |
<P>PROBLEM TO BE SOLVED: To efficiently use a substrate transportation apparatus which transports one or more substrates side by side in parallel, by positioning and fixing a conveyer belt and a guide rail provided to one end of the substrate transportation apparatus, and attaching other guide rail and conveyer belt for position adjustment in the direction orthogonal to the length direction of the guide rail. <P>SOLUTION: The substrate transportation apparatus 20 comprises a reference support member 50 fixed to the prescribed position on a base 23, first and second intermediate movable support members 60 and 70 attached on the base 23 for position adjustment, and an other end movable support member 80. The support members 50, 60, 70, and 80 are attached with guide rails 51, 61, 71, and 81 as well as the conveyer belts 52, 62, 72, and 82, respectively. <P>COPYRIGHT: (C)2004,JPO |
