| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical deflection device compact in an optical axis direction with which parallel deviation in two-dimensional directions and further high-speed operation are feasible. <P>SOLUTION: Spacing between elements in the optical axis direction required for deflection is shared in the two-dimensional directions by providing two sets of optical deflection elements 21a, 21b comprising at least two optical deflection factors 1Xa, 1Ya and 1Xb, 1Yb combined so as to make directions of maximum inclination of respective inclined regions 11Xa, 11Ya and 11Xb, 11Yb nearly perpendicular to each other, placing the two sets of optical deflection elements 21a, 21b opposite to each other on a common optical axis by spacing them at a prescribed distance so as to make directions of maximum inclination of respective inclined regions 11Xa, 11Xb and 11Ya, 11Yb, corresponding to the respective optical deflection factors between the two elements, nearly parallel to each other, making the element 21a two-dimensionally conduct deflection operation, subsequently reflecting the light two-dimensionally in parallel to incident light with the respective inclined regions 1Xb, 1Yb of the optical deflection element 21b and making the light outgo. <P>COPYRIGHT: (C)2004,JPO</p> |
