BIMORPH SWITCH, METHOD OF PRODUCING THE BIMORPH SWITCH, ELECTRONIC CIRCUIT, AND METHOD OF PRODUCING THE ELECTRONIC CIRCUIT

摘要

A bimorph switch electrically connecting a movable contact point and a fixed contact point. The switch comprises a substrate having a front face, a back face, and a through hole penetrating from the front face to the back face; a fixed contact point extending from an edge portion of the opening of the through hole to the inside of the opening; and a bimorph portion holding the movable contact point at a position opposed to the opening and driving the movable contact point. One end of the bimorph portion may be formed on a silicon oxide layer formed on a surface of the substrate.