| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute mass measuring instrument and a minute mass measuring method for measuring the adsorbed/ desorbed amount of a substance existing in an environment as a change in mass from nanogram to picogram. SOLUTION: Before or after a cantilever equipped with an adsorption seed on its end is exposed to a measurement environment to cause it to adsorb/ desorb substances or molecules, the vibration center of the cantilever and a substrate surface are brought closer to each other in distance with the cantilever being vibrated and then they are spaced apart from each other. During this motion, measurement is performed on the amplitude, phase, and frequency of the vibration, or the distance between the substrate and the vibration center of the cantilever. The amount of mass increased/ decreased due to adsorption/ desorption is measured from change in physical quantities concurrent with the behavior of the cantilever such as approaching the substrate or being spaced apart therefrom while being vibrated, such as an amount of change in maximum vibration amplitude in consequence of adsorption/ desorption, an amount of change in distance giving a maximum amplitude, an amount of change in phase, and an amount of change in frequency. COPYRIGHT: (C)2004,JPO
|
