发明名称 INDIUM-CONTAINING WAFER AND METHOD FOR PRODUCTION THEREOF
摘要 <p>An indium-containing wafer, characterized in that it has a layer for removing mercury which comprises an additional compound semiconductor and is formed on the outermost surface thereof for the purpose of removing the mercury attached on the surface of the layer; a method for producing an indium-containing wafer, characterized in that it comprises attaching mercury on the surface of the layer for removing mercury, evaluating electric characteristics of said wafer by using the mercury as an electrode, and then removing said layer for removing mercury, to thereby remove the mercury attached on the surface of the layer. The indium-containing wafer allows the insured removal of the above mercury, resulting in the application of the mercury C-V method which is used for measuring characteristics of an indium-containing wafer with high precision and also is a nondestructive test.</p>
申请公布号 WO2004010490(A1) 申请公布日期 2004.01.29
申请号 WO2003JP09124 申请日期 2003.07.17
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD.;TANAKA, SO;IWASAKI, TAKASHI 发明人 TANAKA, SO;IWASAKI, TAKASHI
分类号 H01L21/66;H01L21/02;H01L21/306;H01L21/322;H01L31/0304;H01L31/10;(IPC1-7):H01L21/66 主分类号 H01L21/66
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