发明名称 |
METHOD OF REDUCING INTERNAL STRESS IN MATERIALS |
摘要 |
<p>Methods are provided for adjusting and controlling the stress between layers of material in a multilayer structure. A first stress is configured in a region of stress on the substrate material. A second material is then deposited over the substrate. A second stress results between the substrate and the second material such that a net stress results where the net stress is a function of said first and second stresses. As such, the first stress can be configured to achieve a predetermined, desired net stress. For example, the first stress can be configured to cancel out the second stress such that the net stress is substantially zero.</p> |
申请公布号 |
WO2004010475(A2) |
申请公布日期 |
2004.01.29 |
申请号 |
WO2003US22846 |
申请日期 |
2003.07.22 |
申请人 |
WRIGHT STATE UNIVERSITY;AMER, MAHER S.;MAGUIRE, JOHN F. |
发明人 |
AMER, MAHER S.;MAGUIRE, JOHN F. |
分类号 |
C23C14/02;C23C14/58;C23C16/02;C23C16/56;G01Q30/02;G01Q60/24;G01Q70/10;G01Q80/00;H01L;H01L21/26;H01L21/30;H01L21/44;(IPC1-7):H01L/ |
主分类号 |
C23C14/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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