发明名称 |
Silica crucibles and methods for making the same |
摘要 |
Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer. |
申请公布号 |
EP1241141(A3) |
申请公布日期 |
2004.01.28 |
申请号 |
EP20020005568 |
申请日期 |
2002.03.12 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG;HERAEUS SHIN-ETSU AMERICA, INC. |
发明人 |
SPENCER, PAUL;KEMMOCHI, KATSUHIKO;TOGAWA, TAKAYUKI;MOSIER, ROBERT |
分类号 |
C03B20/00;C03B19/09;C30B15/10;C30B29/06 |
主分类号 |
C03B20/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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