发明名称 Silica crucibles and methods for making the same
摘要 Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then converted to a continuous layer, thereby minimizing or eliminating bubble formation. The inner layer is also formed using a gettering agent which getters alkaline and alkaline-earth elements while the inner layer is formed. The alkaline and alkaline-earth elements are gettered on an innermost portion of the inner layer which is later removed, leaving an inner layer with relatively few impurities. When used in a CZ-crystal growing process, the inner surface of the crucible remains smooth and substantially no bubbles grow in the inner layer.
申请公布号 EP1241141(A3) 申请公布日期 2004.01.28
申请号 EP20020005568 申请日期 2002.03.12
申请人 HERAEUS QUARZGLAS GMBH & CO. KG;HERAEUS SHIN-ETSU AMERICA, INC. 发明人 SPENCER, PAUL;KEMMOCHI, KATSUHIKO;TOGAWA, TAKAYUKI;MOSIER, ROBERT
分类号 C03B20/00;C03B19/09;C30B15/10;C30B29/06 主分类号 C03B20/00
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