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发明名称
Drying treatment method and apparatus
摘要
申请公布号
EP0903775(A3)
申请公布日期
2004.01.28
申请号
EP19980117644
申请日期
1998.09.17
申请人
TOKYO ELECTRON LIMITED
发明人
KAMIKAWA, YUJI;MINAMI, TERUOMI;KITAHARA, SHIGENORI
分类号
F26B3/04;F26B9/06;F26B21/00;F26B21/14;F26B25/00;H01L21/00;(IPC1-7):H01L21/00
主分类号
F26B3/04
代理机构
代理人
主权项
地址
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