发明名称 Thin-film opto-electronic device and a method of making it
摘要 The present invention is related to a thin-film opto-electronic device and a method of fabricating the same. Particularly this thin film opto-electronic device is fabricated on a Si-containing substrate. The thin-film material is a crystalline semiconductor material. In order to increase the efficiency of this device a porous silicon layer is applied between the thin-film and the substrate. This porous silicon layer has both light reflecting and light diffusing properties thereby giving rise to light confinement in the thin-film.
申请公布号 US6683367(B1) 申请公布日期 2004.01.27
申请号 US20010743076 申请日期 2001.04.09
申请人 IMEC VZW 发明人 STALMANS LIEVEN;POORTMANS JEF;CAYMAX MATTY;SAID KHALID;NIJS JOHAN
分类号 H01L21/00;H01L29/06;H01L31/028;H01L31/052;(IPC1-7):H01L29/06 主分类号 H01L21/00
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