Датчик температуры

摘要

FIELD: microelectronics, instrumentation engineering. SUBSTANCE: thin-film copper thermometer with protective layers of refractory material and inorganic coat is formed on adhesive layer of insulation substrate. Temperature-sensitive resistor comes in the form of multilayer structure Cr- Cu-Cr and has shape of meander. Thickness of chromium layer amounts to 0.05-0.06 mcm. EFFECT: generation of well-reproduced and stable value of temperature coefficient of resistance. 2 dwg