WAFER LOADING SYSTEM OF SCANNER HAVING AIR BLOW UNIT

摘要

PURPOSE: A wafer loading system of a scanner having an air blow unit is provided to be capable of carrying out a photo process after cooling a wafer enough. CONSTITUTION: A wafer loading system of a scanner is provided with a robot arm(111) for transferring a wafer from the outside to a loader(113) and a flat zone alignment part(115) for carrying out a wafer flat zone finding operation. The wafer loading system further includes an air blow unit installed at the upper or lower of the flat zone alignment part for cooling the wafer and a wafer waiting part(117) installed between the flat zone alignment part and a wafer stage of a scanning chamber. Preferably, the air blow unit is further installed at the upper or lower portion of the loader.