DOOR SWITCHING SYSTEM OF FABRICATION EQUIPMENT FOR SEMICONDUCTOR DEVICE

摘要

PURPOSE: A door switching system of fabrication equipment for semiconductor device is provided to prevent the contamination of a process room by maintaining a shielding state between a shielding plate and the process room. CONSTITUTION: A door switching system of fabrication equipment for semiconductor device includes a shielding plate(40), a supporter(42), and a combination member(30). The shielding plate(40) is adhered closely to a gate(G) of a process room(10). The shielding plate(40) includes a support block(14) in order to be connected to a driving unit(16). The supporter(42) is adhered closely to a sidewall of the process room(10) corresponding to an edge of the shielding plate(40). The combination member(30) is used for fixing the shielding plate(40) to the sidewall of the process room(10).