Optical modulator, used in projection displays, comprises a base layer arranged on a substrate, a membrane layer, and devices for applying an electrical voltage between the membrane layer and the substrate

摘要

Optical modulator comprises a base layer arranged on a substrate (2), a membrane layer (3), and devices for applying an electrical voltage between the membrane layer and the substrate to change the distance in the partial region between the base layer and the membrane layer. A hollow chamber (5) is formed between the base layer and the membrane layer in the partial region. An independent claim is also included for a process for the production of the optical modulator.