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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04309228(A)
申请公布日期
1992.10.30
申请号
JP19910073418
申请日期
1991.04.08
申请人
FUJITSU LTD
发明人
NAGASHIMA TAKASHI;SHIN DAISHIYOKU
分类号
H01L21/30;H01L21/027;H01L21/3205
主分类号
H01L21/30
代理机构
代理人
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地址
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