MICRO ELECTRO-MECHANICAL SYSTEM METHOD

摘要

A meso-scale MEMS device having a cantilevered beam (113) is formed using standard printed wiring board and high density interconnect technologies and practices. The beam includes at least some polymer material (71) to constitute its length, and in some embodiments also comprises a conductive material as a load-bearing component thereof. In varying embodiments, the beam is attached at a location proximal to an end thereof, or distal to an end thereof.