| 摘要 |
PROBLEM TO BE SOLVED: To control the polarity of a zinc oxide based thin film formed on a substrate simply and easily. SOLUTION: Polarity of a ZnO substrate 1 is judged. When a ZnO thin film having zinc polarity is desired, a ZnO thin film 2 is formed on the zinc polarity plane 1a of the ZnO substrate 1. When the ZnO thin film having oxygen polarity is desired, the ZnO thin film is formed on the oxygen polarity plane 1b of the ZnO substrate 1. A desired ZnO thin film having properties dependent on the polarity can thereby be attained simply and easily. COPYRIGHT: (C)2004,JPO
|
