发明名称 MAGNETORESISTIVE SEMICONDUCTOR ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To maintain a high magnetic resistance change rate as well as a high input impedance and achieve reduced power consumption even when a magnetoresistive semiconductor element is made small. SOLUTION: The magnetoresistive semiconductor element is provided with a semiconductor operation layer 12 on a substrate 11 and having one set of input-output electrode 13 and a plurality of short-circuiting electrodes 14 on the semiconductor operation layer 12. A part whereat the cross-sectional configuration of the short-circuiting electrode 14 in contact with the semiconductor operation layer 12 has a reversely projected configuration 14a and the sectional configuration of the short-circuiting electrode 14 is T-shaped. In the magnetoresistive element whose resistance is changes by vertically impressing a magnetic field on the surface of the element, the width of the short-circuiting electrode 14 contacted with the semiconductor operation layer 12 is specified so as to be 3μm or less to miniaturize the element, while the sectional configuration of the short-circuiting electrode 14 is specified so as to have the T-shape to sufficiently reduce the resistance of the short-circuit electrode and maintain the high magnetic resistance changing rate of the element. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004022678(A) 申请公布日期 2004.01.22
申请号 JP20020173335 申请日期 2002.06.13
申请人 ASAHI KASEI CORP 发明人 ASHIHARA ARATA;GOTOU HIROMASA
分类号 G01R33/09;H01L43/08;H01L43/12;(IPC1-7):H01L43/08 主分类号 G01R33/09
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