| 摘要 |
PROBLEM TO BE SOLVED: To achieve simplification of an organic EL element manufacturing device and a low cost of an organic EL element accompanying the simplification by improving a material feeding method and a vapor deposition method in vapor deposition in the manufacture of the organic EL element. SOLUTION: When the organic EL element is manufactured, a shape of a material for stably feeding the material is made into a constant shape in order to automatically feed the material and feed only required quantity to a boat each time, so that the stable feeding is realized. Further, a new method for manufacturing the organic EL element is provided by adopting the downward vapor deposition method for enlarging substrate area and devising a boat shape in addition to the material feeding method. COPYRIGHT: (C)2004,JPO
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