发明名称 SPECIMEN HOLDER AND SPECIMEN OBSERVATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a specimen holder for an electron microscope preventing the risk of sticking of dirt or dust on a specimen or break of the specimen arising when the specimen is replaced in the atmosphere by conducting in situ observation for observing the change of the specimen by heating the specimen and/or applying voltage to the specimen without replacing the sample holder. SOLUTION: In the specimen observation with a transmission electron microscope, a heating means is installed in the specimen holder of the electron microscope, and a furnace for filling the specimen and an electrode for applying voltage to the specimen are installed in the inside. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004022192(A) 申请公布日期 2004.01.22
申请号 JP20020171402 申请日期 2002.06.12
申请人 JEOL LTD 发明人 NUNOME KOZO
分类号 G01N1/28;H01J37/20;(IPC1-7):H01J37/20 主分类号 G01N1/28
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