摘要 |
PROBLEM TO BE SOLVED: To provide a specimen holder for an electron microscope preventing the risk of sticking of dirt or dust on a specimen or break of the specimen arising when the specimen is replaced in the atmosphere by conducting in situ observation for observing the change of the specimen by heating the specimen and/or applying voltage to the specimen without replacing the sample holder. SOLUTION: In the specimen observation with a transmission electron microscope, a heating means is installed in the specimen holder of the electron microscope, and a furnace for filling the specimen and an electrode for applying voltage to the specimen are installed in the inside. COPYRIGHT: (C)2004,JPO
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