发明名称 |
Method and apparatus for on-wafer testing of an individual optical chip |
摘要 |
A method for testing an optical chip, while the optical chip is still on a wafer, utilizing an optical probe, includes the steps of creating an access point on the wafer adjacent the optical chip. Inserting a probe at the access point to optically couple the optical probe and optical chip. The optical probe includes at least a first optical waveguide for changing the direction of input light at the probe to optically couple with the optical chip at the access point.
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申请公布号 |
US2004013359(A1) |
申请公布日期 |
2004.01.22 |
申请号 |
US20020298256 |
申请日期 |
2002.11.15 |
申请人 |
LEE KEVIN KIDOO;HOEPFNER CHRISTIAN;LIM DESMOND RODNEY;OH WANG-YUHL |
发明人 |
LEE KEVIN KIDOO;HOEPFNER CHRISTIAN;LIM DESMOND RODNEY;OH WANG-YUHL |
分类号 |
G01M11/00;G02B6/28;G02B6/30;G02B6/42;(IPC1-7):G02B6/26;G02B6/12 |
主分类号 |
G01M11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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